Hello Alik,
We are an equipment supplier and have both experience with micro contact
printing (uCP) and the processing of SU-8.
Our equipment range for Nano Technologies includes systems for Hot Embossing,
uCP and UV Molding.
For the uCP and UV Molding processes, frequently PDMS stamps are used.
Addressing your question in regard to SU-8 processing, we have an SU-8
applacation note, which describes all these parameters. I will send that to you.
The tests and processes described in there are carried out on our lithography
equipment (coaters, mask aligners and developers). Our lithography products are
equipped with special feature for the processing of high viscosity, thick
resists.
For further information on our equipment and information on other papers and
applications notes we published, please check out our web page at
www.evgroup.com.
Best regards,
Markus Wimplinger
Technology Manager EVG US
-----Original Message-----
From: Alik Widge [mailto:[email protected]]
Sent: Montag, 30. Juni 2003 04:14
To: [email protected]
Subject: [mems-talk] SU-8 for uCP
Hello,
Our lab, along with others here at CMU, has for about a year been using
Whitesides' microcontact printing process for some of our bioMEMS work.
We've been fabricating our molds out of AZ4620, which works OK, but does
seem to have a tendency to delaminate from the substrate after the mold is
used a few times. I've noticed many people switching over to SU-8 for their
mold making, and I'd like to give this a try and see if it works better,
but I do not have much experience with that resist, and my impression from
reading MicroChem's literature and external websites is that it can be
tricky to process.
Does anyone have a complete or near-complete protocol that they would be
willing to share for production of PDMS stamp masters from SU-8? I'm
specifically looking for something that gives bake times, exposure dose,
etc. I would be happy to share back with you the results of transferring
this protocol to our equipment, if those data are interesting.
Thank you,
Alik Widge
MEMS Laboratory
Carnegie Mellon University
