Hi everyone,

thank you all especially Kirk and Bob,
you mention a adhesive layer for sputter platinum on silicon wafer
what material should i use? Will Ti or Cr do the job?
One more question, can i sputter gold on silicon wafer?

Derek
7/7/03

----- Original Message -----
From: "Kirt & Erika Zipf-Williams" 
To: "General MEMS discussion" 
Sent: Thursday, July 03, 2003 7:25 PM
Subject: Re: [mems-talk] platinum on SU-8


> > Good day everyone,
> > I am a research student in U.K.
> > Could anyone please tell me wome ways i can deposite platinum film on
> SU-8?
> > Any suggestions are welcomed.
> > Thank you for your time.
> > Chen-Han Lee
>
> You can sputter or evaporate platinum.
> Don't forget to use an adhesion layer.
>
>     --Kirt Williams, Ph.D.   consultant
>
>
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/
>