Our research group has been investigating possible methods to measure and
quantify the force / deflection behavior of some basic 2D MEMS structures. Most
of us are ME's, so I was wondering if anyone could offer suggestions of how to
apply a force to a microstructure and measure (accurately) the displacement or
deflection of the device.

Our structures are basically cantilever beams with a bond pad or some mass at
the end. The beams are of poly Si and 1um thick.

n We have a number of idea's, but nothing exciting to try.

Any help or input is greatly appreciated.
Thanks in advance.
POpdahl