We are very active in the field of flow sensors. Here a few older examples:
http://iqe.ethz.ch/pel/annrep96/demac.html
http://iqe.ethz.ch/pel/annrep95/p1.11.html
http://iqe.ethz.ch/pel/annrep95/p1.6.html
Newer results are published at MEMS '97:
=46. Mayer, O. Paul, and H. Baltes, "Flip-Chip Packaging for Thermal CMOS
Anemometers", Proc. IEEE Micro Electro Mechanical Systems, (IEEE, 1997)
204-208.
Latest results of a complete microsystem including A/D conversion will be
published at IEDM
http://www.his.com/~iedm/abstract5.html#36.2
36.2 Single-Chip CMOS Anemometer, F. Mayer, A. Hab=EBrli, H. Jacobs, G.
Ofner, O. Paul and H. Baltes, ETH Hoenggerberg, Zurich,
Switzerland
Products based one these technologies are being commercialized by a ETH
spin-off company. Quantities you requested are no problem to be delivered.
=46or further information please contact:
[email protected]
=46elix Mayer
Physical Electronics Lab
ETH Hoenggerberg, HPT-H16
CH-8093 Zurich
phone +411 633 24 26
fax +411 633 10 54
>>
>> I am looking for a commercially available micromachined (or miniature=
)
>> air flow sensor for an application requiring about 100, 000 units per
>> year. Any suggestions.
>>
>> John Tudor
_________________________
=46elix Mayer
Physical Electronics Lab
ETH Hoenggerberg, HPT-H16
CH-8093 Zurich
phone +411 633 24 26
fax +411 633 10 54
_________________________