Hello,

You can try contacting Furukawa Electric in Tokyo, Japan. I believe they
have a UV tape that is used to protect the front side of a patterned
wafer during an etching process.

I believe this is their phone number, 3-3286-3213

Thank you,

Mario Robles

Tanaka Systems, Inc.
2577 Leghorn Street
Mountain View, CA 94043

650-966-8001 ofc
650-966-1881 fax
www.dicingblades.com


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Pimpin Alongkorn
Sent: Saturday, July 05, 2003 10:31 PM
To: [email protected]
Subject: [mems-talk] Protect backside of Si wafer from TMAH

Dear Folk,

I would like to purchase a wafer holder for wet etching that can protect
a
backside of wafer from etchant solution such as HF, TMAH and KOH. Could
you
recommend me a Japan company (or other countries are O.K.)? It will be
invaluable help for me. Thank you very much.

Alongkorn Pimpin
THT laboratory

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