Dear all,
does somebody know how to sputter silicon oxide films at low temperature for
a dielectric coating. Is there some literature available? Doe somebody know
a supplier of targets?
Any help is highly appreciated.

Best regards in advance


 -------------------------------------------
Dipl.-Ing. Torsten Kießling
Fraunhofer Institute
Photonic Micro Systems
Grenzstr. 28
D-01109 Dresden

Tel.: +49(0)351/8823-283
Fax:                -266
email: [email protected]
Internet: http://www.ipms.fhg.de/
-------------------------------------------