A further company to try would be Primaxx out of Allentown.

Andy McQuarrie, STS

Message text written by General MEMS discussion
>There are several options for HF vapor etching:

1. Pour some 49+ACU- HF into a non-glass beaker.
Hold the wafer over the beaker for 15 s.
Remove for 15 s (this prevents condensation).
Repeat until done, which may be an hour.
Variations have done using heating of the wafer.

2. Buy a commercial system. The only one I know is
the Excalibur from FSI International of Chaska, Minnesota.
These are relatively new, so don't count on finding a used one
(unless one of the dead optical-switch start-ups has one).

    --Kirt Williams, Ph.D.   consultant
  ----- Original Message -----
  From: Changping
  To: mems-talk+AEA-memsnet.org
  Sent: Tuesday, July 08, 2003 8:12 AM
  Subject: +AFs-mems-talk+AF0- Used equipment for HF vapor dry etch of SiO2


        Hi,

        I am wondering if any body know where there is such an equipment
for sale. What we need to do is to do SiO2 sacrificial etch by HF vapor.
We've a limited budget so we prefer an used equipment with low price.

        Thank you very much and appreciate your reply+ACE-

        Changping
               <