Hello,
I'm working on an optical sensor integrated on silicon with phase
modulation driven by acoutic surface waves (ZnO piezoelectric thin
film)on the reference arm.
The architecture of this sensor is a Mach-Zehnder interferometer and in
order to isolate the measurement arm, I need an acoustic absorber. Until
now, I just realised an isolation trench by deep RIE etching.
Could someone help me ?
Thanks
--
Dr. Eric Bonnotte
LIMMS/Kawakatsu laboratory / CNRS/IIS-The University of Tokyo
7-22-1 Roppongi Minato-ku Tokyo 106 JAPAN
Tel/FAX : +81-3-3402-9568
Tel/Fax Home : +81-3-3411-5381
E-mail : [email protected]
