Contact Ravi or Kai-An at HIONIX, Inc, San Jose, CA
Contact information:

Phone: 1-408-910-8070
e-mail: [email protected]

Good luck.

(Pramod Gupta)

Torsten_Kießling  wrote:
Dear all,
does somebody know how to sputter silicon oxide films at low temperature for
a dielectric coating. Is there some literature available? Doe somebody know
a supplier of targets?
Any help is highly appreciated.

Best regards in advance


-------------------------------------------
Dipl.-Ing. Torsten Kießling
Fraunhofer Institute
Photonic Micro Systems
Grenzstr. 28
D-01109 Dresden

Tel.: +49(0)351/8823-283
Fax: -266
email: [email protected]
Internet: http://www.ipms.fhg.de/
-------------------------------------------


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(Pramod Gupta)

20800 Valley Green Dr., # 445

Cupertino, CA 95014

Phone: (408) 253-1646

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