Dear All,

I sputtered Ti/pt/Au on Silicon Oxide. The thickness is 40/100/200nm. I annealed
them by Rapid Temperature Process. The condition is 415degree 60s first then
400degree 60s in nitrogen. After the first annealing,the surface of gold is
smooth,but in the second annealing the surface of gold appear some small wave
and the gold color have changed,it is white than before.

Could you tell me the reason if you have experience.

Thanks

Zhang Zhenfeng