I  am trying to etch V-grooves in 100 Silicon wafers. I use a silicon
nitrate as a protective layer (approx. 50nm). I use a perspex beaker and
teflon holder. I am  having  a few problems with the process.
1. the side walls of my V-grooves show often waviness
2. the walls are often contaminated with small particles (in the form of
whitish grains) which are difficult to remove. (I use an acid bath to
remove it).
Could anyone help and suggest some solutions?

Thanks in advance

Maryla

Laser Physics Centre,
Ausralian National University
Canberra