If you're using a crystallographic etch, such as KOH, edges of the grooves
will be stepped of they aren't aligned with the <110> planes of the Si.

I have seen residue after KOH etching Si which appears which appears as
submicron globs on a SEM, though I can't see it on an optical microscope.
This particular contamination is easily removed with Piranha.  I am curious
to know what it is.

Roger Shile

----- Original Message -----
From: "Romana Maryla Krolikowska" 
To: 
Sent: Thursday, July 10, 2003 5:18 AM
Subject: [mems-talk] Re: V-grooves


> I  am trying to etch V-grooves in 100 Silicon wafers. I use a silicon
> nitrate as a protective layer (approx. 50nm). I use a perspex beaker and
> teflon holder. I am  having  a few problems with the process.
> 1. the side walls of my V-grooves show often waviness
> 2. the walls are often contaminated with small particles (in the form of
> whitish grains) which are difficult to remove. (I use an acid bath to
> remove it).
> Could anyone help and suggest some solutions?
>
> Thanks in advance
>
> Maryla
>
> Laser Physics Centre,
> Ausralian National University
> Canberra
>
>
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