Hi Maryla, Wet etching for silicon / nitride protective layer should be
fine. What dimensions are you working on? We did silicon V-groves for fiber
optic mounting long time ago. We just used a V-shaped dicing blade and did a
partial dicing on the wafers. It works great. The thickness of the blade and
depth of cutting depends on the V-grove width you are looking for. The
process is clean and quick. We also used laser for 150 micron wide and 150
micron depth. You do get a V-grove, but the walls are very rough. Best
Regards. Gautham

----- Original Message -----
From: "Romana Maryla Krolikowska" 
To: 
Sent: Thursday, July 10, 2003 8:18 PM
Subject: [mems-talk] Re: V-grooves


> I  am trying to etch V-grooves in 100 Silicon wafers. I use a silicon
> nitrate as a protective layer (approx. 50nm). I use a perspex beaker and
> teflon holder. I am  having  a few problems with the process.
> 1. the side walls of my V-grooves show often waviness
> 2. the walls are often contaminated with small particles (in the form of
> whitish grains) which are difficult to remove. (I use an acid bath to
> remove it).
> Could anyone help and suggest some solutions?
>
> Thanks in advance
>
> Maryla
>
> Laser Physics Centre,
> Ausralian National University
> Canberra
>
>
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