Dear Kris,

You may try to put a droplet of photoresist on a silicon wafer or glass,
stick your sample onto it, and do a soft bake.  After the etching, acetone
immersion will release your sample.  I guess this will not change the PH.

Best regards,

Oray Orkun Cellek
Research Assistant, Ph. D. Student
Electrical & Electronics Engineering Department
Middle East Technical University
06531 Ankara
Turkey
Tel : +90 312 210 4579
Fax : +90 312 210 1261
e-mail : [email protected]

----- Original Message -----
From: "kris" 
To: "General MEMS discussion" 
Sent: Thursday, July 10, 2003 9:20 PM
Subject: [mems-talk] Protection of backside of chips in TMAH


> Dear all,
>
> I am trying to etch si in TMAH solution.I have very
> small chips(not wafer) to be etched.As we need to have
> mild stirring for the etchant solution,i was wondering
> how to place my chips in the etchant solution.
>
> Is there anyway that i can etch small chips in TMAH
> solution.I want to know if there is any vendor who can
> supply me epoxy so that i can attach my chips to any
> glass substrate and cure them which also protects the
> backside of the chips.I need epoxy that should not
> change PH of the solution as the etch process is
> highly sensitive to the change in PH values.
>
> Your suggestions would be highly grateful.
>
> Thanks
> Kris
>
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