Kris,

Transene Company offers epoxy resins which would meet your needs.  We
also offer TMAH as well as proprietary isotropic and anisotropic silicon
etchants.  Our products may be viewed at www.transene.com.

Feel free to contact me if you would like to discuss your application
further.

Christopher Christuk
Transene Company
10 Electronics Avenue
Danvers MA  01923
Tel:  978 777 7860
Fax:  978 739 5640
Email:  [email protected]

-----Original Message-----
From: kris [mailto:[email protected]]
Sent: Thursday, July 10, 2003 2:21 PM
To: General MEMS discussion
Subject: [mems-talk] Protection of backside of chips in TMAH

Dear all,

I am trying to etch si in TMAH solution.I have very
small chips(not wafer) to be etched.As we need to have
mild stirring for the etchant solution,i was wondering
how to place my chips in the etchant solution.

Is there anyway that i can etch small chips in TMAH
solution.I want to know if there is any vendor who can
supply me epoxy so that i can attach my chips to any
glass substrate and cure them which also protects the
backside of the chips.I need epoxy that should not
change PH of the solution as the etch process is
highly sensitive to the change in PH values.

Your suggestions would be highly grateful.

Thanks
Kris

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