i tried that too. But the blade don't last long. How long can yours last?

----- Original Message -----
From: "Absara Micro Ststems" 
To: "General MEMS discussion" 
Sent: Friday, July 11, 2003 4:56 PM
Subject: Re: [mems-talk] Re: V-grooves


> Hi Maryla, Wet etching for silicon / nitride protective layer should be
> fine. What dimensions are you working on? We did silicon V-groves for
fiber
> optic mounting long time ago. We just used a V-shaped dicing blade and did
a
> partial dicing on the wafers. It works great. The thickness of the blade
and
> depth of cutting depends on the V-grove width you are looking for. The
> process is clean and quick. We also used laser for 150 micron wide and 150
> micron depth. You do get a V-grove, but the walls are very rough. Best
> Regards. Gautham
>
> ----- Original Message -----
> From: "Romana Maryla Krolikowska" 
> To: 
> Sent: Thursday, July 10, 2003 8:18 PM
> Subject: [mems-talk] Re: V-grooves
>
>
> > I  am trying to etch V-grooves in 100 Silicon wafers. I use a silicon
> > nitrate as a protective layer (approx. 50nm). I use a perspex beaker and
> > teflon holder. I am  having  a few problems with the process.
> > 1. the side walls of my V-grooves show often waviness
> > 2. the walls are often contaminated with small particles (in the form of
> > whitish grains) which are difficult to remove. (I use an acid bath to
> > remove it).
> > Could anyone help and suggest some solutions?
> >
> > Thanks in advance
> >
> > Maryla
> >
> > Laser Physics Centre,
> > Ausralian National University
> > Canberra
> >
> >
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