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MEMSnet Home: MEMS-Talk: 4 inch Wafers thinning
4 inch Wafers thinning
2003-07-14
Marcus Siegert
4 inch Wafers thinning
Marcus Siegert
2003-07-14
dear friends:
Date: 07/14/2003

 we have 4 inch wafers with thickness of 250 microns, DSP and would like to find
a way to do 150 micron DSP wafers. Material is FZ-Wafers. Surface roughness
should be below 5 angstrom. This is the difficulty!!!

Might you can give me some ideas.

Marcus
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