Hello Zani

XeF2 dry etch will not attack your aluminum electrode. To give you an idea of
the low level of attack, XeF2 has been used to make aluminum mirrors because it
will not fog the aluminum maintaining a reflective surface. If you have any
questions about use XeF2 please give me a call or send email. XACTIX is the
overwhelming market leader for XeF2 etching equipment.

Best Regards
David Springer
XACTIX, Inc.
412 381 3195
[email protected]

>>  Hi!,

 >>  I am doing a research in mems sensor, based on
 >>  microhotplate structure. I plan to deposit tin oxide
 >>  (SnO2) as an active element of the sensor. I am not
 >>  sure whether to use aluminium electrode or gold
 >>  electrode for tin oxide deposition. I am also not sure
 >>  whether to use dry etching or wet etching to etch
 >>  silicon to realize the suspended structure.

 >>  These are a few questions regarding this problem:

 >>  1) Doed XeF2 (dry etch) etch aluminium electrode?

 >>  2) Does tin oxide(SnO2) adhere well to aluminium
 >>  electrode?

 >>  3) For tin oxide deposition, which electrode is
 >>  better, aluminium electrode or gold electrode?

 >>  4) Does anybody know which company can perform wet
 >>  etching process using EDP (to etch silicon) and also
 >>  packaging, with a small quantity, about 3 pieces? EDP
 >>  will be supplied by customer.


 >>  Thanks in advance.
 >>  Regards.

 >>  Zaini

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