Tom,

  I guess it all depends on your mask-aligner. In general the mask will
have to be larger than the sample to fix it one way or another. We are using
a 5" mask for 4" wafers. Hope that helps,

Werner.

Date: Tue, 15 Jul 2003 22:26:44 -0700 (MST)
From: Tom Fan
Subject: [mems-talk] Mask size

Hi all,

Whats the typical correlation between the sizes of photomasks and wafers
in
MEMS fabrication? If I were to fabricate microdevices on 4" wafers, do I
need
4" or 5" photomasks? I learned from an Internet site that the masks should
be
1" larger than the wafers to be used. Is this customary or masks of the
same
size as wafers can also be used? Anybody can clarify this issue for me?

Thanks,
Tom Fan


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