you must to use 5'' Mask,sinse your aligner holder is larger than wafer
----- Original Message -----
From: "Tom Fan" 
To: 
Sent: Wednesday, July 16, 2003 1:26 PM
Subject: [mems-talk] Mask size


>
> Hi all,
>
> Whats the typical correlation between the sizes of photomasks and wafers
in
> MEMS fabrication? If I were to fabricate microdevices on 4" wafers, do I
need
> 4" or 5" photomasks? I learned from an Internet site that the masks should
be
> 1" larger than the wafers to be used. Is this customary or masks of the
same
> size as wafers can also be used? Anybody can clarify this issue for me?
>
> Thanks,
> Tom Fan
>
>
>