Hi all,
I have been trying to do lift off of Pt on BST/Alumina substrate for some
time using negative resist.This recipe works perfectly for Si/SiO2/BST but not
for alumina.
Does anybody have any suggestions/ experience on this topic.
Also does anybody know any wet etchant that will etch Pt but not
BST(Barium strontium titanate).Any relevant info will be highly appreciated.
Thanks in advance,
Dipankar
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