It is generally considered to me 10MV/cm for thermal oxide.

-----Original Message-----
From: Rahul Saini [mailto:[email protected]]
Sent: 24 July 2003 00:17
To: [email protected]
Subject: [mems-talk] Breakdown voltage of thermal oxide


Hi,

I want to know the breakdown voltage of 2um thick thermal BOX for a SOI
wafer. I am looking for some reference or an equation to determine the
breakdown voltage with thickness for thermal oxide. Has anyone done any
characterization for calculating the breakdown voltage?


Thanks,
Rahul

MEMS Engineer
Zyvex Corporation
972-235-7881 Ext 266




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