Hey Rahul,

This is a common material property you should be able to find in V/m
everywhere; Try CRC handbook of materials ar any database on the Net.

Jobert van Eisden

-----Original Message-----
From: Rahul Saini [mailto:[email protected]]
Sent: Wednesday, July 23, 2003 7:17 PM
To: [email protected]
Subject: [mems-talk] Breakdown voltage of thermal oxide


Hi,

I want to know the breakdown voltage of 2um thick thermal BOX for a SOI
wafer.
I am looking for some reference or an equation to determine the
breakdown voltage with thickness for thermal oxide.
Has anyone done any characterization for calculating the breakdown
voltage?


Thanks,
Rahul

MEMS Engineer
Zyvex Corporation
972-235-7881 Ext 266




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