dear Hideki
you can read this paper 'MEMS Pressure Sensors for Aerospace Application'
by 'Liwei Lin and Weijie Yun'.
also you can raed this book: 'Theory of plates and shells' by Timoshenko and ...


[email protected] wrote:


Does anybody know how to calculate a comprresive stress from a out-of-plane
deformation
value of free-standing membrane? Or could you tell me related paper or reports?
I have a free-standing Si square membrane that were from SOI substrate. The
membrane is
fabricated in the center of SOI substrate. I mean every edge of the membrane is
supported by the
SOI substrate. The membrane has a thickness of 3um, a lengh and width of 1mm and
a
out-of-plane deformation of 2um.
I want to know how much compresssive stress is loading to the Si membrane.

Thank you.

Hideki Eda



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