Make sure the CTE (coefficient of thermal expansion) of your glass
matches silicon. I think most people use borofoat 7740.

-Mike


>>> [email protected] 07/25/03 10:15 AM >>>

Hi All,

I've done some experiment about silicon to glass anodic bonding.
The bonding was performed at temperature 400 C and 600 V, however it's
followed by the increasing of the current, exceeding 10 mA and then I
found that my p-100 silicon and corning glass was cracked and broken,
but  the bonding is still occured. I use stainless plate and gold
needle probe to apply the voltage. The silicon wafer and
glass was cleaned using acetone cleaning.

Could someone help me explaining this ?
Every comment would be appreciated.

Best regards,

mamien



_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/