Dear All:

I have a question haunting for a long time. It's well known that "MEMS"
represents for Microelectromechanical Systems. Do you know who first
used/proposed this term, in which paper or where?

Best Regards,

Zhang Xuming  Simon
Research Associate
Photonics Lab 1, School of Electrical & Electronic Engineering
Nanyang Technological University (NTU), Singapore
S1-B3a-08, 50 Nanyang Avenue 639798
Tel: (65) 6790 5461   Fax: (65) 6790 4161