Dear Ivan,
just use filtered Mesitylen (the solvent of BCB). You can achieve film
thicknesses below 100 nm.
Regards
Michael
Fraunhofer IZM
Berlin
Germany

-----Ursprüngliche Nachricht-----
Von:    Ivan Shubin [SMTP:[email protected]]
Gesendet am:    Montag, 28. Juli 2003 22:44
An:     [email protected]
Betreff:        [mems-talk] BCB dulition

Dear collegues:
We would like to inquire if any of you have tried to dilute BCB (Cyclotene)
available from Dow Chemicals to achieve thinner coatings. Please, advise on
the procedure.
Thank you very much.

Ivan Shubin
Research Scientist
ECE Department, EBU-1, M.C. 0407
University of California, San Diego
La Jolla, CA 92093
ph./fax (858) 534-6570


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