Hello fellow MEMS researchers,
We would like to purchase a silicon deep trench etcher for our MEMS
research work. We have evaluated a few suppliers namely, Alcatel,
STS and Plasma Therm (still waiting to hear from Oxford Plasma out in
the UK).
It is difficult to conclude which machine is better as there are always
trade offs between several factors (undercut, selectivity and etch rates).
Anyone out there with any comments or suggestions, especially people
who have purchased the deep trench etchers?
Thanks in advance.
Regards
Yan
________________________________________________________________________
Yan Loke
Institute of Microelectronics e-mail : [email protected]
10 Science Park Road Phone : (65) 870-0128
The Alpha #02-19/26 Fax : (65) 777-0670
Singapore 117684
