I'd like to deposit poly-Si to use as a piezoresistor for a pressure sensor. Can
I sputter poly-Si? How can I pattern poly-Si? by lift-off?. Please give me a
clue how I can deposit poly-Si and how I can pattern it.

Thank you for your help in advance.


Sincerely,

---------------------------------------------------------
Byunghoon Bae

Visiting scholar
Mechanical & Industrial Engineering
Univesity of Illinois at Urbana-Champaign
26 MEB MC-244
1206 W. Green St. Urbana, IL 61801
Tel: 1-217-244-7301, Fax: 1-217-244-6534
E-mail: [email protected]

Ph. D. candidate
Dept. of Mechatronics
Kwangju Inst. of Science and Technology(K-JIST)

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Member of mind(maum) meditation center

-¸¶À½Àº Çϳª, ¸¶À½Àº ¸ðµç °Í
Âü³ª¸¦ ã¾Æ, ¼ø¸®ÀÇ ˜®À»-
-Mind is one, mind is everything
Taking the path toward the truthful life-

Mind meditation center:
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