Hello Lin,Yaojian

maybe you can try to use H2SO4+H2O2=3:1
or Aceton with ultrasonic ,this maybe can clean you dirty mask
----- Original Message -----
From: "Lin, Yaojian" 
To: "'General MEMS discussion'" 
Sent: Thursday, July 31, 2003 11:14 PM
Subject: [mems-talk] Mask Clean


> Hello Friends,
>
> I am looking for the methods to clean the dirty mask, which may have some
> polymer spots.
>
> Could you please give me some clue?
>
> With many thanks,
>
> Yaojian Lin
>
>
>
>
>