Try Fluoboric acid 10%, 30C

David

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Lin,
Yaojian
Sent: Friday, August 01, 2003 6:28 PM
To: 'General MEMS discussion'
Subject: [mems-talk] Ti etchant with selectivity to Al(0.5%Cu)


Dear Friends,

I am working on the etchant for 1000A Ti with selectivity to Al(0.5%Cu). I
tried to use diluted (100:1) HF. But it didn't work.

Could you please give me some help?

With many thanks,

Yaojian Lin



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