Working with lithography materials does not much differ from that with any
chemicals from the safety point of view.
Generally, the hood in safety spec should mini-mini-minimize the effect.
A significant evaporation is during coating and baking.
If you have full automatic spinning system (like EVG150 or Falcon or Gamma)
that includes coater and hot plates into the same hood, you have no problem.
But, when transferring manually from the coater to the hot plate, you are,
off cause, exposed to the harmful vapors.
Regards
-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of
[email protected]
Sent: Friday, August 01, 2003 11:45 PM
To: [email protected]; Sarah McQuaide
Cc: Pahnit Seriburi; [email protected]
Subject: [mems-talk] photoresist concern
Hello MEMS community,
This is regarding reproductive disorders associated with the
working of photoresists. I was discussing with a colleague
of mine and it seems that in her past work in cleanrooms her
general observation was that numerous women of childbearing
age who were intimately involved in the lithography process,
were unable to bear children or had high incidences of
miscarriage.
I would like to know if others have made similar
observations or where such data can be found. Is it true
that the solvent vapors from the lithography process that
one is exposed to even when working under a well ventilated
fume hood, with a mask can result in
infertility/miscarriage?
I looked at some of the MSDS of some of the photoresists we
commonly use in the lab - the AZ4620, 9260, 1512 and most of
them indicate that no harmful effect caused to the mother
will have no harmful effect on the fetus. I understand that
working in cleanroom esp with the lithography process is not
advisable during pregnancy but does anyone know of damage
that can be done by regular use.The developers & resist
srtip particularly EKC830 seem to be more harmful.
All of us are exposed to solvent fumes during spin-on,
pre/post bake, development. What is meant by overexposure?
3-4 hours/day
2-3days/week or 40+hrs a week only with lithography?
Any help towards information in this direction would be
greatly appreciated.
Looking fwd to hearing from you and working in a safe and
healthy environment
Sincerely
Anupama
>
> As this is secondhand information I do not want to become
> alarmed, but Anupama and I think this would be a good
> topic to research and discuss, possibly as a topic at our
> group meeting. I don't know if there is much in the way of
> published material - we may only find information via the
> internet- but it is a good issue for women in the lab to
> be conscious of.
>
> Cheers,
> Sarah
>
> Sarah McQuaide
> Research Engineer, Genomation Lab
> University of Washington Electrical Engineering Dept.
> (206) 616-1394
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