PDMS is such a soft material I wonder if any one has developed a method
for metal deposition that preserves conductivity in a thin film? We have
looked at deposition of aluminum as a reflective layer to no avail. We
had poor adhesion and lots of cracks. Fortunately we found a work-around
using another polymer.

-Mike

>>> [email protected] 08/02/03 08:24PM >>>
I am trying to deposit NiCr pattern to PDMS. PDMS is spun on the Si
wafer.

At first, I tried to lift-off after pattern PR on PDMS, but PR has
cracks when baking due to thermal mismatch (my quess) between Si and PR.
So, I changed to the way that I deposit metal first then PR spinning and
patterning, and NiCr etching using  NiCr etchant.

However, when I deposit NiCr on PDMS by using sputtering, there are
serious cracks on metal. I don't know how I can solve this problem. I
appreciate any comments and expertises. Thanks.




Sincerely,

---------------------------------------------------------
Byunghoon Bae

Visiting scholar
Mechanical & Industrial Engineering
Univesity of Illinois at Urbana-Champaign
26 MEB MC-244
1206 W. Green St. Urbana, IL 61801
Tel: 1-217-244-7301, Fax: 1-217-244-6534
E-mail: [email protected]

Ph. D. candidate
Dept. of Mechatronics
Kwangju Inst. of Science and Technology(K-JIST)


Member of mind(maum) meditation center

-      ,
      ,     ? -
-Mind is one, mind is everything
Taking the path toward the truthful life-

Mind meditation center:
Korean: http://www.maum.org
English: http://211.47.66.148/eng/
Japanese: http://www.kokolo.org


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