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MEMSnet Home: MEMS-Talk: wafers for KOH etching
wafers for KOH etching
2003-08-05
John Fijol
2003-08-05
Kenneth Smith
2003-08-06
John Fijol
2003-08-11
Ertl, Stephan
wafers for KOH etching
John Fijol
2003-08-05
Hello,

   I am looking for vendors of high quality, defect free, 4" Si wafers
for KOH etching.  I am currently using CZ wafers oriented to <100>+/-
0.1 degrees, 525um+/- 0.25 um thick and a primary flat oriented to <110>
+/- 0.25 degrees.  The wafers work well most of the time, but
occasionally I encounter yield problems due to crystal defects.  I am
looking to evaluate other wafer vendors and would like any
comment/suggestions on high quality suppliers.  Also, what is your
preference (CZ vs. FZ) for KOH etching?

Thanks

John Fijol


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