Hi all
Has anyone tried to pattern an Ag-AgCl electrode on either glass or siliocon
substrate? I deposited and patterned Ag and immersed in chlorine based
bleach solution, but Ag easily peels off.
Although Ag-AgCl electrode is very often used for the electrical detection
of biological stuff, I don't see it in Bio-MEMS literatures. Most people use
Ti/Au or Cr/Au electrode. But in my observation, Cr as an adhesion layer
elutes when the current flows and the electrode peels off as well.
Any suggestion/discussion would help.
Thanks,
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Hiroaki SUZUKI
The University of Tokyo
Institute of Industrial Science (IIS)
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