Hi Ken,

   Thanks for the info.  Do you have some literature you could E-mail?

John Fijol

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On
Behalf Of Kenneth Smith
Sent: Tuesday, August 05, 2003 2:02 PM
To: General MEMS discussion
Subject: Re: [mems-talk] wafers for KOH etching

Hello John,

I can supply high quality Float Zone and CZ wafers. The FZ wafers will
typically have lower defect densities than CZ due to the growth method,
but they also have much lower O2 levels as well and higher
resistivities.
Feel free to contact me and let me know what other specifications that
you may need in your products.

Regards,
Ken Smith
Kmbh Associates
47 Rocket Circle
Rancho Cordova, CA 95742  U  S  A
510-714-5055 Efax- 510 217 4421
High Purity Float Zone and Specialty CZ Silicon, SOI and Glass wafers


John Fijol wrote:
> Hello,
>
>    I am looking for vendors of high quality, defect free, 4" Si wafers
> for KOH etching.  I am currently using CZ wafers oriented to <100>+/-
> 0.1 degrees, 525um+/- 0.25 um thick and a primary flat oriented to
<110>
> +/- 0.25 degrees.  The wafers work well most of the time, but
> occasionally I encounter yield problems due to crystal defects.  I am
> looking to evaluate other wafer vendors and would like any
> comment/suggestions on high quality suppliers.  Also, what is your
> preference (CZ vs. FZ) for KOH etching?
>
> Thanks
>
> John Fijol




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