Anshu,

   I am not aware of a quantitative measurement, but index of refraction
is a good qualitative measure of density for transparent films.  A good
spectroscopic ellipsometer will provide an accurate measure of index and
absorption.  Index will drop from theoretical values as film densities
decrease.  I have also used this measurement to monitor stochiometery of
evaporated and reactively sputtered oxide films. What films are you
looking at and do you need quantitative measurements?

John Fijol

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On
Behalf Of anshu mehta
Sent: Wednesday, August 06, 2003 4:08 AM
To: [email protected]
Subject: [mems-talk] Density measurement

Hi!

Does anyone have suggestions on ways to measure
density for thin films?

Thanks,
Anshu.


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