Hi,
Please look at "Fabrication and characterization of a new planar solid-state
reference electrode for ISFET sensors
by Huang, I.-Y. / Huang, R.-S., in Thin Solid Films, 406 ( 2002) 255-261.
See also: "Improvement of integrated Ag/AgCl thin-film electrodes by KCl-gel
coating for ISFET applications" by
Huang, I.-Y. / Huang, R.-S. / Lo, L.-H., in Sensors and Actuators B 94 (2003)
53-64
Herein some literature overview on the topic, including earlier work by
M. Steyaert, M. Lambrechts and W. Sansen on "Noise power spectrum density
analysis of planar Ag/AgCl electrodes"
in Sensors and Actuators 12 1987 185-192
and L. J. Bousse, P. Bergveld and H. J. M. Geeraedts on "Properties of Ag/AgCl
electrodes fabricated with IC-compatible technologies"
Ibid, 9 1986 179-197
Would be interested in results of your further search for strategies / summary
of the mems-group-discussion.
Might be you could pass it along?
Best regards
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Dr. Stefan Fiedler
Fraunhofer - Institut fuer
Zuverlaessigkeit u. Mikrointegration
Gustav-Meyer-Allee 25
D-13355 Berlin
Germany
Telefon +49 (0) 30/46403-217
Telefax +49 (0) 30/46403-271
e-mail [email protected]
http://www.izm.fhg.de
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Hiroaki SUZUKI wrote :
> Hi all
>
> Has anyone tried to pattern an Ag-AgCl electrode on either glass or siliocon
> substrate? I deposited and patterned Ag and immersed in chlorine based bleach
> solution, but Ag easily peels off.
>
> Although Ag-AgCl electrode is very often used for the electrical detection of
> biological stuff, I don't see it in Bio-MEMS literatures. Most people use
> Ti/Au or Cr/Au electrode. But in my observation, Cr as an adhesion layer
> elutes when the current flows and the electrode peels off as well.
>
> Any suggestion/discussion would help.
> Thanks,
>
> ----------------------------
> Hiroaki SUZUKI
> The University of Tokyo
> Institute of Industrial Science (IIS)
> ----------------------------
>
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