We have some experience with Al magnetron sputtering on SU8. I don't know if
it helps you?
Anyway, in order to get a good adhesion there should be a very effective
Sputter Etch step before Al sputtering to activate the surface of SU8.

David

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of ERIC
SIMONE
Sent: Wednesday, August 06, 2003 11:47 PM
To: [email protected]
Subject: [mems-talk] Su8/ Al adhesion problem


Hello all -

I was wondering if anyone could give me some insight on how to get better
adhesion of metal (Al in particular) to Su8. I'm evaporating a thin film
(~2000A) on top of 25-30um of Su82025. Everytime though I seem to get rather
poor adhesion. I'm using SJR 5740 to pattern the metal on top of Su8. Thank
you for your help.

Regards,
Eric Simone


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