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MEMSnet Home: MEMS-Talk: Bonding on PZT
Bonding on PZT
1997-10-17
Eric Bonnotte
Bonding on PZT
Eric Bonnotte
1997-10-17
Hello MEMS's Men,

I try to make wire bonding on a PZT thin film (with high roughness) with
a classical deposition of Cr and Gold on but each time, the layers of Cr
and Gold are peeled off.
 What can I do ?
remark : the surface of the PZT film is to small for use silver past.
Thanks for your help

Eric
--
Dr. Eric Bonnotte
LIMMS/Kawakatsu laboratory / CNRS/IIS-The University of Tokyo
7-22-1 Roppongi Minato-ku Tokyo 106 JAPAN
Tel/FAX : +81-3-3402-9568
Tel/Fax Home : +81-3-3411-5381
E-mail : [email protected]


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