Hi MEMS-People:
I am looking for thin-film-soi-wafers.
Following specification is required:
Device-layer:
Diameter: 150 mm
Type: n-type
Orientation:<100>
Thickness: 300 nm - 500 nm
Resistivity: 0.3 (let me know what range you can offer!!!)
BOX:
2000 - 5000 angstrom, please specify!!!)
Handle:
Dopant: any
Orientation: any
Resistivity: any
Thickness: > 400 µm
Flatness: <5µm
All other specification are N/S.
Quantity: 25 pcs.
Please let me know who can supply such specification???
Thanks and regards,
Marcus Siegert