Food Service 304 stainless steel tanks work reasonably well. You can get
them from restaurant supply stores very easily. As an added bonus, they're
often fairly inexpensive.

Bill Eaton, Ph.D.
Materials, Analysis, and Test Manager
NP Photonics

> -----Original Message-----
> From: [email protected]
> [mailto:[email protected]]On Behalf Of
> Mark West
> Sent: Thursday, August 07, 2003 10:27 AM
> To: [email protected]
> Subject: [mems-talk] Tanks for KOH etching
>
>
> What is the preffered type of tank for KOH etching? Load is a
> single 25
> wafer cassette of 4" wafers. temp range is 80 - 100 C.
>
> Quartz is not compatible and plastic tanks are difficult to heat. Just
> wondering if anyone has found a good product for this application.
>
> M. W.
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