Hi Lisen,
   There's TMAH in that developer! If you absolutely must use aluminum,
reverse the polarity of your mask(s) and use negative resist.

-Mike

>>> [email protected] 08/08/03 02:35PM >>>
Hi,there,
Anyone has experience with patterning Al. I got
problem when developing the photoresist, the Al layer
is etched by the developer. I tried SHipley and AZ
resists, but both have the same problem. THanks
Lisen

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