Unfortunately, almost all developers (that I am aware of), will etch Al
slightely. Its annoying in that you end up seeing exactly where you
misaligned - the case where you most often see it. Ive never actually
measured it, but it doesnt appear to be that much - maybe a hundred nm -
for a typical develop cycle. Just enuf to see it.
It shudnt be enuf to affect you, unless you are working with very thick
resists that you need to highly overdevelop.

--
Tom Rust
Nanochip Inc
7700 Edgewater Dr., Suite 665
Oakland, CA 94621
(510) 339-6263
(510) 339-9636 FAX
(510) 912-4662 cell
http://www.nanochip.com