> Where can I find the recommended recipe for Ni/7%V target in MRC sputter.
> I have tried searching the web, but without successes.

David,
any reason why you can not just ask your supplier ?
KDF makes the MRC batch machines now, and TFE is their european rep.

The recipe will definitely depend on the type of target you are using.

best regards,
klaus

--

                        (TEEL)          Tokyo Electron Europe Limited
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Klaus Beschorner                                   Tel +49-7033-45683
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