Hi there !

HMR of Donaueschingen in Germany used to make a smart system with a reflow tank
made of PP. The temperature can be kept constant within less than 1°. The
company itself was sold some time ago, but people started "Lotus Systems"
(www.lotussystems.de) soon after. They should be able to provide similar
machines.

Best regards
Stephan

-----Ursprüngliche Nachricht-----
Von: beaton@npphotonics (Bill Eaton) [mailto:[email protected]]
Gesendet: Donnerstag, 7. August 2003 20:42
An: 'General MEMS discussion'
Betreff: RE: [mems-talk] Tanks for KOH etching

Food Service 304 stainless steel tanks work reasonably well. You can get
them from restaurant supply stores very easily. As an added bonus, they're
often fairly inexpensive.

Bill Eaton, Ph.D.
Materials, Analysis, and Test Manager
NP Photonics

> -----Original Message-----
> From: [email protected]
> [mailto:[email protected]]On Behalf Of
> Mark West
> Sent: Thursday, August 07, 2003 10:27 AM
> To: [email protected]
> Subject: [mems-talk] Tanks for KOH etching
>
>
> What is the preffered type of tank for KOH etching? Load is a
> single 25
> wafer cassette of 4" wafers. temp range is 80 - 100 C.
>
> Quartz is not compatible and plastic tanks are difficult to heat. Just
> wondering if anyone has found a good product for this application.
>
> M. W.
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