Hi Lisen,

Al is etched by standard base developers (TMAH & KOH) If you want to patter
Al, try lift-off using something like the AZ 5200 series, or alternatively
pattern Al with a Chlorine based dry etch.

Regards,

Jobert van Eisden
SUNY Albany

-----Original Message-----
From: LSWANG [mailto:[email protected]]
Sent: Friday, August 08, 2003 5:35 PM
To: [email protected]
Subject: [mems-talk] Aluminum etched by developer


Hi,there,
Anyone has experience with patterning Al. I got
problem when developing the photoresist, the Al layer
is etched by the developer. I tried SHipley and AZ
resists, but both have the same problem. THanks
Lisen

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