Anand,

A good reference for photolithography on three dimensional structures is:

N. Pham, T. Scholtes, R. Klerk, B. Wieder, P. Sarro, J. Burghartz, "Direct Spray
Coating of Photoresist for MEMS Applications," Proceedings of SPIE, vol. 4557,
2001, pp. 312-319

I am a process engineer specializing in the development of processes for use on
the spray coating system mentioned in this article, and so have quite a bit of
experience on a wide array of device designs, so if you have any further
questions, or need clarification on any topics mentioned in the above paper,
feel free to contact me at any time.

Best Regards,
Chad Brubaker

EV Group       invent * innovate * implement
Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail:
[email protected], www.EVGroup.com

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 -----Original Message-----
From:   mems work [mailto:[email protected]]
Sent:   Sunday, August 03, 2003 3:26 PM
To:     [email protected]
Subject:        [mems-talk] Electrodes in Microchannel

Hi..
     Can anyone point to me to papers on making electrodes in a
microchannel for a microfluidic application with electrophoresis and
electroosmosis or MHD requirements...

Also any pointers to photoresist patterning of the bottom and sidewalls of a
silicon microchannel ?


Thanks,
Anand

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