Balaji,
Glass to Glass does in fact bond via direct bond methods. The temperature
required for final anneal is generally in the 275C to 350C range depending upon
the materials. However, as in standard fusion bonding, the biggest issue is
roughness (local surface roughness) and flatness. If the surface is too rough,
intimate contact cannot be created, and if the substrate is not flat enough,
intimate contact cannot be created across the entire surface.
In addition, glass is very hydroscopic, so unless care is taken during surface
activation, voids can occur after annealing, even if the pre-anneal condition is
void free.Here are the issues:
These comments apply to quartz, pyrex, Corning glasses, sapphire, and ordinary
soda lime glass.
If you have any further questions, feel free to contact me, or check out our web
site at www.evgroup.com.
Best Regards,
Chad Brubaker
EV Group invent * innovate * implement
Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail:
[email protected], www.EVGroup.com
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-----Original Message-----
From: Balaji Srinivasan Venkatesh [mailto:[email protected]]
Sent: Monday, August 11, 2003 2:12 PM
To: [email protected]
Subject: [mems-talk] Glass-Glass thermal fusion bonding
Hi..
I would like to do a Glass-Glass Fusion bonding without any intermediate
layer ..Does it require any particular type of glass and can anybody let me know
the protocol for this kind of bonding.
Also any suggestion on UV Bonding of glass would be of help..
Thank You,
Balaji
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