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MEMSnet Home: MEMS-Talk: Adhesion layer for sapphire?
stress relaxation by backside etch?
2003-08-12
Justin Borski
2003-08-13
David Nemeth
Adhesion layer for sapphire?
2003-08-13
Mark Fuller
2003-08-18
Kirt & Erika Zipf-Williams
Humidity sensors in MEMS
2003-08-27
ramji dhakal
2003-08-27
Debjyoti Banerjee, Ph.D.
2003-08-21
Ronald C Caldwell
2003-08-13
Jason Viotty
2003-08-22
Michael D Martin
Adhesion layer for sapphire?
Mark Fuller
2003-08-13
I am trying to get a good bond between Indium and sapphire.
I am currently using sputtered Ti as an adhesion layer.
The adhesion layer is failing in a following thermal cycle.
Any suggestions as to what would work better?

--
Mark Fuller
Microelectronics Fabrication Facility
Washington State University
Dana Hall 102
Pullman, WA  99164-2711
(509)335-1797

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